Impacts of N2 Import into Reaction System on the Structures and Properties of the Graphite-Amorphous Carbon Films

Abstract:

Graphite-amorphous carbon films were grown by sputtered Ni target in Ar/CH4 mixture atmosphere. The impacts of N2 import into reaction system on the structures and properties of the graphite-amorphous carbon films were studied. The results shown that graphite-amorphous carbon films with good hardness, elastic and friction coefficient were obtained at the N2/CH4 flow ratio below 20/80. Beyond the flow ratio of 20/80, the number and size of nanocrystal graphite decrease induce the bad hardness, elastic and friction coefficient of the graphite-amorphous films. Graphite-amorphous carbon films properties were possible correlate with the size and number of nanocrytal graphite and its crosslinking degree to carbon network, especially the former.

• Periodical: Advanced Materials Research (Volumes 750-752)
• Pages: 1924-1929
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.750-752.1924
• Online since: August 2013
• Authors: Bin Zhang, Li Qiang, Xiao Ling, Jun Yan Zhang
• Keywords: Amorphous Carbon Films, Elastic, Friction Coefficient (FC), Mechanical Property

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