Fabrication of Aspheric Micro Lens Array by Slow Tool Servo

Chun Chieh Chen; Choung Lii Chao; Wei Yao Hsu; Fong Chi Chen; Chung Woei Chao

doi:10.4028/www.scientific.net/AMR.76-78.479

Paper Titles

Processing Grinding-Damaged Silicon Wafers by High-Frequency Nano-Second Laser Irradiation
p.451

Measuring Surface Uniformity in Chemical Mechanical Polishing
p.459

Abrasive Surfaces Measured by Digital Optical Stereopsis
p.465

The Effect of Cooling Lubrication Methods on Surface Roughness Measured by the White Light Interferometer
p.471

Fabrication of Aspheric Micro Lens Array by Slow Tool Servo
p.479

Fundamentals of BK7 Glass Removal in Micro/Nano-Machining
p.485

The Experimental Research on Small Hole Machining in Glass Using Diamond Abrasive Core-Tools
p.491

Fabrication of Carbon Nanotube Probes in Atomic Force Microscopy
p.497

A Study of Carbon Nanotubes as Cutting Grains for Nano Machining
p.502

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 76-78Fabrication of Aspheric Micro Lens Array by Slow...

Fabrication of Aspheric Micro Lens Array by Slow Tool Servo

Abstract:

Owing to the fast development in photonic, telecommunication, and opto-electronic industries, the demand for various micro-lens arrays is rapidly growing. The slow tool servo technique was applied on an ultra-precision diamond turning machine in the present research in conjunction with the tool path generating algorithm for aspheric micro-lens array fabrication. An aspheric lens array of 100% filling factor was successfully produced and the form accuracy and surface roughness were better than 0.15μm and 3nm for all the obtained lenses.