Fabrication of Aspheric Micro Lens Array by Slow Tool Servo

Abstract:

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Owing to the fast development in photonic, telecommunication, and opto-electronic industries, the demand for various micro-lens arrays is rapidly growing. The slow tool servo technique was applied on an ultra-precision diamond turning machine in the present research in conjunction with the tool path generating algorithm for aspheric micro-lens array fabrication. An aspheric lens array of 100% filling factor was successfully produced and the form accuracy and surface roughness were better than 0.15μm and 3nm for all the obtained lenses.

Info:

Periodical:

Advanced Materials Research (Volumes 76-78)

Edited by:

Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa

Pages:

479-484

DOI:

10.4028/www.scientific.net/AMR.76-78.479

Citation:

C. C. Chen et al., "Fabrication of Aspheric Micro Lens Array by Slow Tool Servo", Advanced Materials Research, Vols. 76-78, pp. 479-484, 2009

Online since:

June 2009

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Price:

$35.00

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