Fabrication of Aspheric Micro Lens Array by Slow Tool Servo
Owing to the fast development in photonic, telecommunication, and opto-electronic industries, the demand for various micro-lens arrays is rapidly growing. The slow tool servo technique was applied on an ultra-precision diamond turning machine in the present research in conjunction with the tool path generating algorithm for aspheric micro-lens array fabrication. An aspheric lens array of 100% filling factor was successfully produced and the form accuracy and surface roughness were better than 0.15μm and 3nm for all the obtained lenses.
Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa
C. C. Chen et al., "Fabrication of Aspheric Micro Lens Array by Slow Tool Servo", Advanced Materials Research, Vols. 76-78, pp. 479-484, 2009