Fabrication of Carbon Nanotube Probes in Atomic Force Microscopy

Zong Wei Xu; Feng Zhou Fang; Xiao Tang Hu

doi:10.4028/www.scientific.net/AMR.76-78.497

Paper Titles

The Effect of Cooling Lubrication Methods on Surface Roughness Measured by the White Light Interferometer
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Fabrication of Aspheric Micro Lens Array by Slow Tool Servo
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Fundamentals of BK7 Glass Removal in Micro/Nano-Machining
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The Experimental Research on Small Hole Machining in Glass Using Diamond Abrasive Core-Tools
p.491

Fabrication of Carbon Nanotube Probes in Atomic Force Microscopy
p.497

A Study of Carbon Nanotubes as Cutting Grains for Nano Machining
p.502

Study on Unique Cutting Phenomena in Micro Endmilling - Mechanism and Possibility to Occur-
p.508

An Approach for Improvement of Machining Accuracy in Micro End Milling
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Evaluation of GMR Head Durability against Nanoscale Scratches Using High-Field Transfer Curves
p.520

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 76-78Fabrication of Carbon Nanotube Probes in Atomic...

Fabrication of Carbon Nanotube Probes in Atomic Force Microscopy

Abstract:

Carbon nanotube (CNT) probe used in atomic force microscopy (AFM) was fabricated by using electron beam induced Pt deposition method. The bonding force for CNT probe was found to be larger than 500nN. The nanotube probe’s length was shortened by focused ion beam milling process. It is confirmed that the CNT probe shows higher aspect ratio than the Si probe. The nanotube probes with fullerene-like cap end present higher imaging resolution than those with open end.

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Periodical:

Advanced Materials Research (Volumes 76-78)

Pages:

497-501

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.76-78.497

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Online since:

June 2009

Authors:

Zong Wei Xu, Feng Zhou Fang, Xiao Tang Hu

Keywords:

Atomic Force Microscope (AFM), Focused Ion Beam (FIB), Metrology, Nanotube

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