The Optimization and Experiment of the Low-Pressure Water Jet Assisted Laser Etching on Al2O3 Ceramic

Chun Ying Chen; Gen Fu Yuan

doi:10.4028/www.scientific.net/AMR.760-762.806

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 760-762The Optimization and Experiment of the...

The Optimization and Experiment of the Low-Pressure Water Jet Assisted Laser Etching on Al₂O₃ Ceramic

Abstract:

The ordinary laser etching on Al₂O₃ ceramic could bring many problems. Here introduced a new process named low-pressure water jet assisted laser etching on Al₂O₃ ceramic. The new composite process is much better than ordinary laser etching on Al₂O₃ ceramic. And the water jet can greatly reduce the thermal cracks and slag which improved the quality of the Al₂O₃ ceramic surface apparently. It also shows that the parameters of the laser have complex influences on the etching surface quality. Here introduces the method of orthogonal experiment to finish the experiment. Via this method can not only reduce the times of the experiment but also clearly reflect the optimization of the experimental parameters.

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Periodical:

Advanced Materials Research (Volumes 760-762)

Pages:

806-810

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.760-762.806

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Online since:

September 2013

Authors:

Chun Ying Chen, Gen Fu Yuan

Keywords:

Al₂O₃ Ceramic, Laser Etching, Low-Pressure Water Jet, Optimization

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