Signal Detecting and Characteristic Measurement of a Capacitive Triaxial Micro-Accelerometer

Zhi Hua Jiang; Zong Yi  Ma; Ye Yuan

doi:10.4028/www.scientific.net/AMR.765-767.2164

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 765-767Signal Detecting and Characteristic Measurement of...

Signal Detecting and Characteristic Measurement of a Capacitive Triaxial Micro-Accelerometer

Abstract:

This paper introduces the principle of capacitive detection and specific method of signal detecting based on a triaxial micro-accelerometer. The corresponding detecting circuit is designed, and a suitable test system is set up. The sensitivity and accuracy test results of the triaxial micro-accelerometer show that all the masses sensitivity has nice consistency, the micro-accelerometer is feasible in theory and practice, and with the capability of precisely measuring the input acceleration in three directions.

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Periodical:

Advanced Materials Research (Volumes 765-767)

Pages:

2164-2167

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.765-767.2164

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Online since:

September 2013

Authors:

Zhi Hua Jiang, Zong Yi Ma, Ye Yuan

Keywords:

Accuracy Test, Capacitive Detection, Sensitivity Test, Triaxial Micro-Accelerometer

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