Preparation of WO3 Nanorods by Glancing Angle DC Reactive Magnetron Sputtering Deposition for NO2 Gas Sensing Application

T. Srichaiyaperk; K. Aimpanakit; M. Horprathum; S. Limwichean; C. Chananonnawathorn; A. Wisitsoraat; B. Samransuksamer; D. Phokharatkul; P. Eiamchai; P. Chindaudom

doi:10.4028/www.scientific.net/AMR.770.267

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 770Preparation of WO3 Nanorods by Glancing Angle DC...

Preparation of WO₃ Nanorods by Glancing Angle DC Reactive Magnetron Sputtering Deposition for NO₂ Gas Sensing Application

Abstract:

In this study, we present a tungsten trioxide (WO₃) nanorods based gas sensor for NO₂ sensing at operating temperature range 150-350 °C in purify dry air carrier. WO₃ nanorods were fabricated by dc reactive magnetron sputtering with glancing angle deposition (GLAD) technique on silicon (100) wafer and alumina substrates interdigitated with gold electrode. The length of WO₃ nanorods was varied from 370 nm to 620 nm. As-deposited nanorods were annealed at a temperature of 400 °C in air for 1 h. The microstructure and phase structure of WO₃ nanorod were characterized by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM), respectively. XRD of annealed WO₃ nanorod showed polycrystalline phase. The WO₃ nanorods length 420 nm exhibit excellent NO₂ sensing properties with a maximum sensitivity of 360 at 250 °C operating temperature with fast response and recovery time.

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Periodical:

Advanced Materials Research (Volume 770)

Pages:

267-270

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.770.267

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Online since:

September 2013

Authors:

T. Srichaiyaperk, K. Aimpanakit, M. Horprathum, S. Limwichean, C. Chananonnawathorn, A. Wisitsoraat, B. Samransuksamer, D. Phokharatkul, P. Eiamchai, P. Chindaudom

Keywords:

Glancing Angle Deposition, Nanorods, NO₂ Sensor, Sputtering, Tungsten Oxide

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