Structural, Optical and Anti-Bacterial Properties of TiO2 Thin Films Prepared by DC Reactive Magnetron Sputtering

A. Mungchamnankit; K. Sornsanit; M. Horprathum; C. Chananonnawathorn; P. Eiamchai; Kamon Aiempanakit; Jakrapong Kaewkhao

doi:10.4028/www.scientific.net/AMR.770.283

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 770Structural, Optical and Anti-Bacterial Properties...

Structural, Optical and Anti-Bacterial Properties of TiO₂ Thin Films Prepared by DC Reactive Magnetron Sputtering

Abstract:

Recent studies demonstrated that, titanium oxide (TiO₂) thin films, which kill bacteria and viruses under mild UV illumination, offers numerous potential applications. In this work, the TiO₂ thin films were successfully deposited by DC reactive magnetron sputtering technique. The high-purity Ti target was sputtered on BK7 glasses and silicon (100) wafer substrates. The annealing treatment at various temperatures was next performed on the obtained samples. Their crystalline structure, film morphology and optical properties, as well as anti-bacterial activities, were investigated. The structure and morphology of films were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM). The optical property was determined by UV-Vis spectrophotometer. After the post-annealing in air at higher than 200 °C, all the films showed crystallized mixture of anatase and rutile phase. The antibacterial properties of the TiO₂ thin films were discussed.

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Periodical:

Advanced Materials Research (Volume 770)

Pages:

283-286

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.770.283

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Online since:

September 2013

Authors:

A. Mungchamnankit, K. Sornsanit, M. Horprathum, C. Chananonnawathorn, P. Eiamchai, Kamon Aiempanakit, Jakrapong Kaewkhao

Keywords:

Anti-Bacterial Properties, Thin Film, Titanium Dioxide (TiO₂)

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References

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