Study and Analysis of MEMS Pressure Sensor Based on Applied Mechanics

Li Feng Qi; Zhi Min Liu; Xing Ye Xu; Guan Zhong Chen; Xue Qing

doi:10.4028/www.scientific.net/AMR.771.159

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 771Study and Analysis of MEMS Pressure Sensor Based...

Study and Analysis of MEMS Pressure Sensor Based on Applied Mechanics

Abstract:

The relative research of low range and high anti-overload piezoresistive pressure sensor is carried out in this paper and a new kind of sensor chip structure, the double ends-four beam structure, is proposed. Trough the analysis, the sensor chip structure designed in this paper has high sensitivity and linearity. The chip structure is specially suit for the micro-pressure sensor. The theoretical analysis and finite element analysis is taken in this paper, which provide important scientific basis for the pressure sensor development.

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Periodical:

Advanced Materials Research (Volume 771)

Pages:

159-162

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.771.159

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Online since:

September 2013

Authors:

Li Feng Qi, Zhi Min Liu, Xing Ye Xu, Guan Zhong Chen, Xue Qing

Keywords:

Analysis, Finite Element Analysis (FEA), MEMS, Piezoresistive, Pressure Sensor, Study

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