Design and Analysis of a Novel Capacitive RF MEMS Switch with Folded Beam

Zhong Liang Deng; Sen Fan; Cai Hu Chen; Hua Gong

doi:10.4028/www.scientific.net/AMR.774-776.1677

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 774-776Design and Analysis of a Novel Capacitive RF MEMS...

Design and Analysis of a Novel Capacitive RF MEMS Switch with Folded Beam

Abstract:

In this paper, the design, optimization and equivalent circuit model for a K-band capacitive RF MEMS switch are presented. The fixed-ﬁxed switch is designed with folded structures on the high-resistance silicon substrate, by using gold as the beam and silicon nitride as the dielectric layer. The resulting switch working on 25.2GHz exhibits the performance with insertion loss less than 0.20dB, isolation more than 40dB and the drive voltage less than 16V by simulation.

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Periodical:

Advanced Materials Research (Volumes 774-776)

Pages:

1677-1680

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.774-776.1677

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Online since:

September 2013

Authors:

Zhong Liang Deng, Sen Fan, Cai Hu Chen, Hua Gong

Keywords:

Equivalent Circuit, Folded Beam, RF MEMS, Simulation, Switch

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References

[1] Chirag D. Patel and Gabriel M. Rebeiz: Microwave theory and techniques, Vol. 59(2011), No. 5, pp.1230-1237.

Google Scholar

[2] Gabriel M. Rebeiz: RF MEMS Theory, Design, and Technology(John Wiley & Sons, USA 2003).

Google Scholar

[3] Ramesh Ramadoss and Simone Lee, Y. C. Lee: Microelectromechanical systems, Vol. 15(2006), No. 6, pp.1595-1603.

Google Scholar

[4] Vincent Puyal, Daniela Dragomirescu and Christina Villeneuve: Microwave theory and techniques, vol. 57(2009), No. 11, pp.2824-2832.

Google Scholar

[5] Preeti Sharma, ShibanK. Koul and R. Murlidharan: 2008 International Conference of Recent Advances in Microwave Theory and Applications, Microwave 2008 (Jaipur, India, November 21-24, 2008). Vol. 1, pp.271-273.

Google Scholar