Intensities of H_β and H_γ in Hydrogen Plasma Spectrum with High RF Power Levels at ICP

Abstract:

In high-power RF ion source, three different regions of the H_β and H_γ intensities in the Balmer series of spectral lines for atomic hydrogen plasma were investigated. Three different regions of the H_β and H_γ intensities were detected by the increase of input power (0-6 kW) at ICP. In hydrogen plasma spectrum, the H_β and H_γ intensities showed three processes: slowly increase, quickly increase and stable saturation. The Stark effect in strong electrical field plays a crucial role in dominating the Balmer H_β and H_γ emissions from high-density RF plasma.

• Periodical: Advanced Materials Research (Volumes 774-776)
• Pages: 471-478
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.774-776.471
• Online since: September 2013
• Authors: Song Bai Wang, Guang Jiu Lei, Ming Li, Li Ming Yu, Ying Nan Bu, Wei Yuan Ni, Lu Liu, Dong Ping Liu, Si Ze Yang
• Keywords: Balmer H_β and H_γ Emissions, High-Density Hydrogen Plasmas, NBI, RF Discharge, Stark Effect

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