Study on Fabrication and Properties of Copper-Tin-Oxide Thin Films

Abstract:

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Copper-tin-oxide thin films have been prepared on quartz substrates by the magnetron sputtering method. The structural,optical and electrical properties were investigated. The prepared samples were amorphous, CuSnO3 single crystalline grains with perovskite structure were observed after annealing temperature was above 530°C. The optical and electrical properties had great dependence with reactive gas pressure and annealing temperature. Thermal probe reveals p type conductivity of some samples. Keywords: Magnetron sputtering, CuSnO3, Perovskite structure

Info:

Periodical:

Advanced Materials Research (Volumes 79-82)

Edited by:

Yansheng Yin and Xin Wang

Pages:

787-790

DOI:

10.4028/www.scientific.net/AMR.79-82.787

Citation:

T. Ning et al., "Study on Fabrication and Properties of Copper-Tin-Oxide Thin Films", Advanced Materials Research, Vols. 79-82, pp. 787-790, 2009

Online since:

August 2009

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Price:

$35.00

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