Study on Fabrication and Properties of Copper-Tin-Oxide Thin Films

Ti Ning; Feng Ji; Jin Ma; Zhen Guo Song; Xu An Pei; Yong Liang Tan

doi:10.4028/www.scientific.net/AMR.79-82.787

Paper Titles

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Experimental Study and FEM Analysis on Ceramic Composite Coating
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Study on Fabrication and Properties of Copper-Tin-Oxide Thin Films
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Fabrication of Mesoporous N-TiO₂ Membrane and its Spectral Characteristics
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Effect of Heat Treatment on Optical Properties of Cold Spray TiO₂ Coated Glass
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 79-82Study on Fabrication and Properties of...

Study on Fabrication and Properties of Copper-Tin-Oxide Thin Films

Abstract:

Copper-tin-oxide thin films have been prepared on quartz substrates by the magnetron sputtering method. The structural,optical and electrical properties were investigated. The prepared samples were amorphous, CuSnO3 single crystalline grains with perovskite structure were observed after annealing temperature was above 530°C. The optical and electrical properties had great dependence with reactive gas pressure and annealing temperature. Thermal probe reveals p type conductivity of some samples. Keywords: Magnetron sputtering, CuSnO3, Perovskite structure