Transparent Conducting SnO2:Zn Films Prepared on Sapphire by MOCVD

Zhen Guo Song; Feng Ji; Jin Ma; Ti Ning; Xu An Pei; Yong Liang Tan

doi:10.4028/www.scientific.net/AMR.79-82.771

Paper Titles

Effects of the Deposition Temperature on the Structure and Solar Control Performance of TiN Coatings Prepared by APCVD
p.755

Single Crystalline SnO₂:In Films Prepared on Sapphire by MOCVD
p.759

Structural and Optoelectronic Properties of Single Crystalline SnO₂:Ga Films Deposited on α-Al₂O₃ (0001) by MOCVD
p.763

Cutting Performance of TiAlSiN Coated Cemented Carbide Tool with Post-Deposition Heat Treatment
p.767

Transparent Conducting SnO₂:Zn Films Prepared on Sapphire by MOCVD
p.771

Fabrication of Self-Healing Ceramic Coating Against Oxidation for Carbon/Carbon Composite Using Polysilazane and Fillers
p.775

Effects of Nano-Al₂O₃p on Thermal Shock Behaviors of NiCoCrAlY Coatings by Laser Cladding
p.779

Experimental Study and FEM Analysis on Ceramic Composite Coating
p.783

Study on Fabrication and Properties of Copper-Tin-Oxide Thin Films
p.787

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Transparent Conducting SnO₂:Zn Films Prepared on Sapphire by MOCVD

Abstract:

1-10% {atomic ratio of Zn/(Zn+Sn)} zinc-doped tin oxide (SnO2:Zn) films were successfully prepared on sapphire substrates by MOCVD method. The structural, optical and electrical properties of the SnO2:Zn films were investigated. The obtained films were high quality crystalline films with high a-axis orientation. The optical transmittance of the SnO2:Zn films with the thickness 1-1.4μm was about 80% in visible region. The Hall mobility and carrier concentration of the SnO2:Zn films varied with the Zn content increasing.