Design of Micromachined Thermal Expansion Gas Gyroscope Signal Detection Circuit

Abstract:

Micromachined thermal expansion gas gyroscope has the advantages of simple configuration, large working range and high shock resistance and can be widely used in the military and civilian field. However, as with other MEMS sensors,the output signal of micromachined thermal expansion gas gyroscope's sensitive structure is weak and difficult to detect are designed. In this paper, the design of the detecting circuits for micromachined thermal expansion gas gyroscope based on the phase sensitive detector is introduced. The measurement results of the prototype show a system scale factor of 2.3419 mV/(°·s-1), a non-linearity of 0.22%, a symmetry of 0.0037, and a zero-bias stability of 1.0182 °/s.

• Periodical: Advanced Materials Research (Volumes 791-793)
• Pages: 1036-1040
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.791-793.1036
• Online since: September 2013
• Authors: Jing Wei, Yan Su, Xin Hua Zhu
• Keywords: ADC, Digital Filter, Micromachined Thermal Expansion Gas Gyroscope (MTEGG), Signal Detect

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