Investigation of Pure-Lateral-Field-Excitation Bulk Acoustic Wave Sensor with Different Electrodes on (yxl)89° LiNbO₃ Single Crystal

Abstract:

Lateral field excitation (LFE) acoustic wave devices, which employ two electrodes on the same surface of a piezoelectric substrate, have been found attractive in sensing applications. However, up to now, the sensitivities of pure-LFE devices based on LiNbO₃ single crystal is unknown. In this work, the effective LFE exciting electric field direction of (yxl)89° LiNbO₃ is determined. The calculated results showed that when the driving electric field direction is perpendicular to the crystallographic X-axis of the piezoelectric substrate, (yxl)89° LiNbO₃ LFE device works on pure-LFE mode. Based on this, several LiNbO₃ pure-LFE bulk acoustic wave sensors with three different electrodes are designed and fabricated. The results show that the (yxl)89° LiNbO₃ LFE sensor with interdigital electrodes is 11.1 times and 2.2 times more sensitive to changes in liquid conductivity compared to traditional LFE devices with single gap circular electrodes and Archimedes spiral electrodes, respectively. The results are important for investigating high-sensitivity LFE bulk acoustic wave sensors by using LiNbO₃ single crystal.

• Periodical: Advanced Materials Research (Volumes 791-793)
• Pages: 545-549
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.791-793.545
• Online since: September 2013
• Authors: Jia Lin Jiang, Ting Feng Ma
• Keywords: Bulk Acoustic Wave Sensor, LiNbO₃ Single Crystal, Piezoelectric, Pure-Lateral-Field-Excitation

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