Optimization of Process Parameters Based on Multi-Process and Multi-Evaluation Index for Function Ceramics in CMP

Zi Hua Hu; Jiao Peng; Man Ke Gao

doi:10.4028/www.scientific.net/AMR.797.266

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Optimization of Process Parameters Based on Multi-Process and Multi-Evaluation Index for Function Ceramics in CMP
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 797Optimization of Process Parameters Based on...

Optimization of Process Parameters Based on Multi-Process and Multi-Evaluation Index for Function Ceramics in CMP

Abstract:

To enhance polishing quality, polishing efficiency and improve the backward state based on single-process way for function ceramics in CMP, a new optimization method of process parameters based on multi-process and multi-evaluation theory is put forward. Firstly, based on experimental data obtained from orthogonal experiment, the optimal combinations of process parameters are got separately in term of surface roughness and material removal rate, which is optimized by Taguchi method in each process. Secondly, combining analysis of evaluation index weight ratio with analysis of variance, the final optimal combination of process parameters is received under the integrated evaluation of surface roughness and material removal rate. Finally, the contrast verification results show that the proposed optimization method is effective.

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Periodical:

Advanced Materials Research (Volume 797)

Pages:

266-272

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.797.266

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Online since:

September 2013

Authors:

Zi Hua Hu, Jiao Peng, Man Ke Gao

Keywords:

CMP, Function Ceramics, Multi-Process Theory, Process Optimization

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References

[1] Xianlin Dong: Journal of Chinese Academy of Sciences. No. 6 (2003), p.407 (in Chinese).

Google Scholar

[2] Zhao Ping, Pengfei Fan and Julong Yuan, et al: Aeronautical Manufacturing Technology. No. 4(2003), p.64 (in Chinese).

Google Scholar

[3] Ming Jiang, R. Komanduri: Wear. Vol. 213(1-2) (1997), p.59.

Google Scholar

[4] B. H. Lv, J. L. Yuan, and F. Cheng: Advanced Materials Research. Vol. 69-70 (2009), p.69.

Google Scholar

[5] Jiang M, Komanduri R: Key Engineering Materials. Vol. 202-203(2001), p.1.

Google Scholar

[6] C. R. Zhu, B. H. Lv and J. L. Yuan: Advanced Materials Research. Vol. 53-54(2008), p.131.

Google Scholar

[7] Wang Y, Zhou X J and Hu D J: International Journal of Machine Tools & Manufacture. Vol. 46(3-4) (2006), p.333.

Google Scholar

[8] Gou-Hen WANG, Jau-Liang CHEN: The Japan Society of Mechanical Engineers. Vol. 2(44) (2001), p.534.

Google Scholar

[9] Park B, Lee H and Kim Y: Japanese Journal of Applied Physics. Vol. 47(12) (2008), p.167.

Google Scholar

[10] Zihua Hu, Manke Gao, Julong Yuan and Xiangjun Yang: Advanced Materials Research. Vol. 497 (2012), p.268.

Google Scholar