Advantages of MEMS and its Distinct New Applications

Abstract:

In this paper,we first discuss the main distinct advantages of MEMS as well as the important differences between MEMS and IC,then some latest research progresses on biomedical, optical and automotive applications of MEMS are briefly reviewed. Finally,possible future developments of MEMS are prospected.

• Periodical: Advanced Materials Research (Volume 813)
• Pages: 205-209
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.813.205
• Online since: September 2013
• Authors: Ying Jian Chen
• Keywords: Application, Automotive, Biomedical, IC, MEMS, Optical, Sensor

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