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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 816-817Investigation of Composition-Properties’ Relations...

Investigation of Composition-Properties’ Relations on Silicon and Carbon Based Nanomaterials

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Abstract:

Multicomponent thin films (binary-SiC and ternary-SiCAl) as well as single thin films (silicon Si) were deposited using Thermionic Vacuum Arc (TVA) technology. The thin films were characterized using X-ray diffractometer (XRD, Philips PW1050, Cu K), scanning electron microscope (SEM, Zeiss EVO 50 SEM) accompanied with energy dispersive spectrometer and transmission electron microscope (TEM, Phillips CM 120 ST, 100 kV). The film is composed of nanoparticles very smoothly distributed of 15-30 nanometer size embedded in amorphous matrix film. The results reveal high hardness for SiC (10-40 GPa) and for SiCAl: low wear rate (6.16E-05 mm³/Nm).

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Manufacturing Science and Technology (ICMST2013)

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Periodical:

Advanced Materials Research (Volumes 816-817)

Pages:

232-236

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.816-817.232

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Online since:

September 2013

Authors:

Rodica Vladoiu, Aurelia Mandes, Mirela Contulov, Virginia Dinca, Corneliu Porosnicu

Keywords:

Carbon, Nanomaterial, Silicon, TEM, Thermionic Vacuum Arc (TVA)

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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