Properties of SiO₂CuO_x Films for Nitrogen Dioxide Detection

Abstract:

SiO_xCuO_y thin films were prepared by the deposition on to the Si/SiO₂ substrates from the alcoholic solutions employing the sol-gel technique. The various analytic techniques were applied to characterize structure and properties of the films under study . The both X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) studies showed the presence CuO as well as CuO₂ phases and formation of a dual-oxide CuSiO₃ with the average crystallites sizes of 35-50 nm. The conductance of the films was rather sensitive to the presence of 1-20 ppm NO₂ concentration at the operating temperatures in the range of 20–200 ^◦C.

• Periodical: Advanced Materials Research (Volumes 834-836)
• Pages: 112-116
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.834-836.112
• Online since: October 2013
• Authors: Tatiana Myasoedova*, G.E. Yalovega, V.V. Petrov, O.V. Zabluda, V.A. Shmatko, A.O. Funik
• Keywords: Crystal Structure, Gas Sensor, Nitrogen Dioxide, Phase Composition, Thin Film

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