The Research of Nano-Mechanical Properties of Mono-Crystalline Silicon

Xiao Jing Yang; Wei Xing Zhang

doi:10.4028/www.scientific.net/AMR.834-836.18

Paper Titles

Preface and Conference Organization

Preparation of Coralloid α-FeOOH and Discussion on its Crystal Growth Mechanism
p.3

Facile Preparation of the Single Crystalline In₂S₃ Nanosheets with Highly Efficient Photocatalytic Activity
p.8

Study on Cerium Doped Flower-Like ZnO Microcrystaline Preparation and its Microwave Absorbing Properties
p.12

The Research of Nano-Mechanical Properties of Mono-Crystalline Silicon
p.18

Friction and Wear Property of Ti(C,N)/ZrO₂/WC Nano-Composite Cermet Die Material
p.23

Fabrication and Characterization of Superhydrophobic Film on Titanium Substrate
p.29

Toward the High-Quality Graphene for Optoelectronic Applications by Optimization of the Growth and Transfer Parameters
p.33

Synthesis of β-Phase GeO₂ Nanoparticles and their High Pressure Studies
p.37

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 834-836The Research of Nano-Mechanical Properties of...

The Research of Nano-Mechanical Properties of Mono-Crystalline Silicon

Abstract:

The research of the nano-mechanical properties on mono-crystalline silicon by nanoindention technology is reported in this paper . Using the calculation method given by Oliver and Pharr, the hardness and the elastic modulus of mono-crystalline silicon are gained from the load-penetration depth curve. The simulation on mono-crystalline silicon in the plastic phase is carried out by ABAQUS. Based on the bilinear constitutive law and approximate relationship between the hardness and the yield strength, the obtained load-penetration depth curve through the finite element method is compared with the materials actual load-penetration depth curve and good correlation is achieved.

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Periodical:

Advanced Materials Research (Volumes 834-836)

Pages:

18-22

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.834-836.18

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Online since:

October 2013

Authors:

Xiao Jing Yang, Wei Xing Zhang*

Keywords:

Elastic Modulus, Finite Element Method (FEM), Nanohardness, Nanoindentation, Plastic Properties

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* - Corresponding Author

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