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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 881-883Effects of Bias on Optical and Chemical Bonding...

Effects of Bias on Optical and Chemical Bonding Properties of Germanium Carbon Films

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Abstract:

Amorphous hydrogenated Ge1-xCx films are prepared by radio frequency (RF) magnetron cosputtering using Ge/graphite composite target and their composition, optical and chemical bonding properties as a function of bias have been investigated. The results show a decrease in the deposition rate with increasing bias, and the optical gap nearly keep constant due to effects of both composition and chemical bonding. Through the analysis of X-ray photoelectron spectroscopy, we find that the content of Ge-C bonds first increases and then decreases as increasing bias while the Ge-O bond decreases monotonically.

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Periodical:

Advanced Materials Research (Volumes 881-883)

Pages:

1074-1078

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.881-883.1074

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Online since:

January 2014

Authors:

Xing Sen Che*, Zheng Tang Liu

Keywords:

Chemical Bonding, Cosputtering, Germanium Carbon, Optical Property

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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