Fabrication of Polymer Micro-Patterns by Transient Thermolithography with Thickness Control

Jung Chao Hsu; Jui Chieh Chen; Ming Tsung Hung

doi:10.4028/www.scientific.net/AMR.893.679

Paper Titles

Synthesis of Mesoporous Molecular Sieve MCM-41 and its Adsorption Behavior for Rhodamine B
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Design of the Face Structure of the Grinding-Driller Based on Deform-3D
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Calculation Method for Interference Value in Metal Joining Structure
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Simulation of HDIs Behaviors in the Plasma Arc Cold Hearth Melting Process
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Fabrication of Polymer Micro-Patterns by Transient Thermolithography with Thickness Control
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Numerical Study on Normal Stress Distributions in a Single-Lap Adhesive Joint
p.685

Three-Dimensional Non-Linear FE Analysis of Shear Stress Distributions in Adhesively Bonded Joint
p.690

Analysis of the Sustainable Construction Concept of the Vernacular Materials
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The Mode and Nature Frequency of Pipes Conveying Fluid with Distributed Follower Force on Two-Parameter Foundation
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 893Fabrication of Polymer Micro-Patterns by Transient...

Fabrication of Polymer Micro-Patterns by Transient Thermolithography with Thickness Control

Abstract:

Thermolithography uses heat as the exposure source which has the possibility to generate patterns with minimum feature size exceeding the diffraction limit in photolithography. In addition, heat transport is much slower than light which allows us to control the transport distance. In this manuscript, we use transient heating to generate micro patterns of polymer resist with different thickness. The experiments use thin film micro-heaters with pulsed heating. Different pulse widths and periods are used to control the temperature rises and accumulated heating durations. The trend of the resulting resist thicknesses reveals the important role of the relaxation time in the crosslinking reaction.

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Periodical:

Advanced Materials Research (Volume 893)

Pages:

679-682

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.893.679

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Online since:

February 2014

Authors:

Jung Chao Hsu, Jui Chieh Chen, Ming Tsung Hung*

Keywords:

Crosslinking, Micro-Nanofabrication, Polymer, Thermolithography

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