The Impact Response Characteristics Research of the Multilayer Structure, Cantilever-Type Electrothermal Actuator Based on MEMS

Ya He Wang; Yue Yue Shen; Chao Lv

doi:10.4028/www.scientific.net/AMR.901.87

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 901The Impact Response Characteristics Research of...

The Impact Response Characteristics Research of the Multilayer Structure, Cantilever-Type Electrothermal Actuator Based on MEMS

Abstract:

To study the impact response characteristics of multilayer structure, cantilever-type electrothermal actuators based on MEMS, a composite cantilever-beam model consisting of two layers of materials, SiO₂ and Al, is built. By using the engineer mechanics theory, the von mise stress under the impacts in the fuze system can be obtained. Meanwhile, the Finite Element Method (FEM) simulation is made to get the deformation displacement of the fixed end and the von mises stress distribution of the model. Besides, the natural frequency response is studied. The results present the actuators response characteristics of impacts in the fuze system.

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Periodical:

Advanced Materials Research (Volume 901)

Pages:

87-92

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.901.87

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Online since:

February 2014

Authors:

Ya He Wang*, Yue Yue Shen, Chao Lv

Keywords:

Cantilever Beam, Electrothermal Actuator, Impact Response, Natural Frequency

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