Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China.
The 19 papers are grouped as follows:
Chapter 1: Materials Science, Processing and Application,
Chapter 2: MEMS Design and Production

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Info:

eBook:

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ToC:

Table of contents

Editors:

Changhui Liu

DOI:

https://doi.org/10.4028/b-akdl4T

THEMA:

TGB, TGM

BISAC:

TEC021000

Keywords:

Application, Materials Science, MEMS Design, Processing, Production

Details:

Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China

Pages:

128

Year:

2014

ISBN-13 (softcover):

9783038350477

ISBN-13 (CD):

9783037957424

ISBN-13 (eBook):

9783038264286

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