Fabrication of Multiple Al Micro-Materials by Electromigration Using a Comb Pattern and a Conductive Passivation Film

Abstract:

Electromigration (EM) is the phenomenon of atomic diffusion in a metallic film with a high-density electron flow. Our group used EM to fabricate Al micro-materials. The EM technique can be used to fabricate micro-materials with a high aspect ratio, pure metal components, an arbitrary form, and a single-crystal structure. Recently, two micro-materials have been simultaneously fabricated using an array pattern consisting of parallel or series connections. However, multiple micro-materials have not been fabricated simultaneously thus far. In this study, a new comb sample pattern was used with a conductive passivation film to produce multiple Al micro-materials.

• Periodical: Advanced Materials Research (Volume 909)
• Pages: 36-40
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.909.36
• Online since: March 2014
• Authors: Yasuhiro Kimura*, Masumi Saka
• Keywords: Al Micro-Materials, Atomic Diffusion, Comb Pattern, Conductive Passivation, Electromigration

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