Characterization of Micro-Gap Electrodes Initial Pattern on Resist by Employing High Sensitive and Selective Chrome Mask

Abstract:

The detection of most serious diseases at early stages is one of the challenging tasks for researchers of nanotechnology. Therefore the current research article is one of the attempts to fabricate highly sensitive and selective micro-gap electrodes at initial level; such micro-gap electrodes will be used in future for inserting biomolecule in between the gap spacing. To transfer the micro-gap design pattern to sample wafer accurately and preciously, micro-gap was initially designed by using AutoCAD software and the design was finally transferred to high sensitive and selective chrome mask. The article demonstrates experimentally an initial strategy for fabrication of micro-gap electrodes at resisting using conventional photolithography technique coupled with the wet etching process. The structure morphology was characterized using high power and scanning electron microscope namely (HPM and SEM).

• Periodical: Advanced Materials Research (Volume 925)
• Pages: 564-569
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.925.564
• Online since: April 2014
• Authors: M. Haisu, Uda Hashim, Q. Humayun
• Keywords: Autocad, Biomolecule, Chrome Mask, Micro-Gap, Nanotechnology, Photolithography

References

[1] Likharev K K, 2003, Nano and Giga Challenges in Microelectronics ed J Greer, A Korkin and J Labanowski (Amsterdam: Elsevier).

DOI: 10.1016/b978-044451494-3/50000-7

[2] Fischbein M D and Drndic M 2007 Sub-10 nm device fabrication in a transmission electron microscope. Nano Lett. 7 1329–37.

DOI: 10.1021/nl0703626

[3] Venkataraman L, Klare J E, Nuckolls C, Hybertsen M S and SteigerwaldM L 2006 Dependence of single-molecule junction conductance on molecular conformation Nature 442 904–7.

DOI: 10.1038/nature05037

[4] Haag R, Rampi M A, Holmlin R E and White H S 1999 Electrical breakdown of aliphatic and aromatic self-assembled monolayers used as nanometer-thick organic dielectrics J. Am. Chem. Soc. 121 7895–906.

DOI: 10.1021/ja990230h

[5] Q. Humayun and U. Hashim, Recent advancement in microgap electrode fabrication by conventional photolithography technique, 2012, pp.22-25.

DOI: 10.1109/smelec.2012.6417082

[6] Long D P, Patterson C H, Moore M H, Seferos D S, Bazan G C and Kushmerick J G 2005 Magnetic directed assembly of molecular junctions Appl. Phys. Lett. 86 153105.

DOI: 10.1063/1.1899772

[7] Ramachandran G K et al 2003 Electron transport properties of a carotene molecule in a metal–(single molecule)–metal junction J. Phys. Chem. B 107 6162–9.

DOI: 10.1021/jp0343786

[8] Galperin M, Ratner M A and Nitzan A 2007 Molecular transport junctions: vibrational effects J. Phys.: Condens. Matter 19 103201.

DOI: 10.1088/0953-8984/19/10/103201

[9] Datta S, Tian W, Hong S, Reifenberger R, Henderson J I and KubiakP 1997 Current–voltage characteristics of self-assembled monolayers by scanning tunneling microscoy Phys. Rev. Lett.

DOI: 10.1103/physrevlett.79.2530

[10] Q. Humayun and U. Hashim, Microstructure pattern etching by reactive ion etching (RIE) for future reproductivity of nanogap biosensor, 2012, pp.499-502.

DOI: 10.1109/iecbes.2012.6498101

[11] Bonnell D A (ed) 1993 Scanning Tunneling Microscopy and Spectroscopy: Theory, Techniques, and Applications (New York: VCH).

[12] Chen F, Qing Q, RenL, Wu Z and Liu Z 2005 Electro chemical approach for fabricating nanogap electrodes with well controllable separation Appl. Phys. Lett. 86 123105.

DOI: 10.1063/1.1871361

[13] Negishi R, Hasegawa T, Terabe K, Aono M, EbiharaT, Tanaka H and Ogawa T 2006 Fabrication of nanoscalegapsusing a combination of self-assembled molecular and electron beam lithographic techniques Appl. Phys. Lett. 88 223111–3.

DOI: 10.1063/1.2209208

[14] Venkataraman L, Klare J E, Nuckolls C, Hybertsen M S and Steigerwald M L 2006 Dependence of single-molecule junction conductance on molecular conformation Nature 442 904–7.

DOI: 10.1038/nature05037

[15] Haag R, Rampi M A, Holmlin R E and White H S 1999 Electrical breakdown of aliphatic and aromatic self-assembled monolayers used as nanometer-thick organic dielectrics J. Am. Chem. Soc. 121 7895–906.

DOI: 10.1021/ja990230h

[16] Q. Humayun and U. Hashim, Development of microstructure on polysilicon substrate by reactive ion etching (RIE) for future reproductivity of nanogap, pp.774-777, (2012).

DOI: 10.1109/smelec.2012.6417258

[17] Q. Humayun and U. Hashim, Effect of pH on the capacitive behavior of microgap sensor, 2012, pp.383-386.