Design of Measurement and Control System Based on Mechanical Properties of MEMS Materials

Abstract:

Mechanical properties of MEMS materials is one of MEMS important basic theory research, including hardness, elastic modulus, yield strength, tensile strength, fatigue strength and other performance indicators. For the acquisition and processing of weak signal can meet the system, this paper designs a measurement and control system which has a common set of software and hardware of high speed, high accuracy, high reliability in one. This tester is mainly composed of four parts: precision positioning subsystem, specimen clamping subsystem, load/displacement measurement subsystem and measuring and controlling subsystem, which provides a solid foundation in higher positioning accuracy of measuring MEMS materials and benefits more for further research.

• Periodical: Advanced Materials Research (Volumes 926-930)
• Pages: 1522-1525
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.926-930.1522
• Online since: May 2014
• Authors: Jie Pan, Zi Jian Weng, Guo Chao Gan, Yi Feng Mo, Zhi Wei Lin*
• Keywords: Design, Mechanical Property, MEMS Materials

References

[1] Dang Xiangrong, Xie Yan, Li Lipin. principle and application of TMS320C3X DSP. Shanxi Science and Technology Press, 2006. P. 183-195. (In Chinese).

[2] Li Shiping, Wei Zengliang, Dai Fan. The Application of Computer Measurement and Control technology and Xian University of Electronic Science and Technology Press, P. 112-135. (In Chinese).

[3] Chen Zhang, Su Wei, WAN Min. Test Methods for MEMS Material Mechanical Properties. Micronanoelectronic Technology, vol. 44 (2007) no. 6, pp.319-323. (In Chinese).

[4] Tang Zhongbin, Xu Fei, LI Yulong. Determination of Mechanical Behavior of MEMS Materials. Journal of Mechanical Strength, vol. 29 (2007) no. 3, pp.409-418. (In Chinese).

[5] Caijun Sun, Hao Wu, Zhanshe Guo, et al. Mechanical Testing Methods of Micro Structures. Journal of exprimental mechanics, vol. 20 (2005) no. 3, pp.441-447. (In Chinese).