The Electrostatic Potential inside the Electron-Optical Systen with Periodic Boundary-Value Conditions

Ting Hang Pei; Kuen Yu Tsai; Jia Han Li

doi:10.4028/www.scientific.net/AMR.933.534

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 933The Electrostatic Potential inside the...

The Electrostatic Potential inside the Electron-Optical Systen with Periodic Boundary-Value Conditions

Abstract:

A program based on the SOR method have been setup for calculating the electrostatic potential inside the electron optical system (EOS). This method can deal with large domain calculation more efficiently than by using the finite difference or finite element methods. Since the MEBDW system is composed of an array of EOSs, periodic boundary conditions in the x and y directions are applied. A case of EOS is demonstrated in this paper.

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Advanced Materials Research (Volume 933)

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534-537

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.933.534

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Online since:

May 2014

Authors:

Ting Hang Pei, Kuen Yu Tsai, Jia Han Li

Keywords:

Electron Optical System, Electron-Optical-Objective-Lens, Multiple-Electron-Beam-Direct-Write Lithography, Successive-Over-Relaxation Method

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