Microstructure and Adhesion Properties of a-CN and Ti/a-CN Nanocomposite Thin Films Prepared by Hybrid Ion Beam Deposition Technique

P. Vijai Bharathy; Q. Yang; D. Nataraj

doi:10.4028/www.scientific.net/AMR.938.36

Paper Titles

Effect of Surfactants on Structural and Dielectric Properties of Cobalt Ferrite
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Modified Sol-Gel Production of Nano SDC20 Materials
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Effect of Heat Treatment on Structural, Magnetic and Electric Properties of Z-Type Barium Cobalt Hexaferrite Powder
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Kinetics of Silver Nanoparticle Growth Using DMF as Reductant – Effect of Surfactants
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Microstructure and Adhesion Properties of a-CN and Ti/a-CN Nanocomposite Thin Films Prepared by Hybrid Ion Beam Deposition Technique
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In Situ Synthesis of Copper Phthalocyanine Modified Multiwalled Carbon Tube and its Electrocatalytic Application towards the Oxidation of Nitrite
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Study on the Structure and Morphology of Ce_xZr_(1-x)O₂ Mixed Oxides
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Morphological Studies of Electrodeposited Cobalt Based Coatings: Effect of Alloying Elements
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Plasma Enhanced Chemical Vapor Deposition Time Effect on Multi-Wall Carbon Nanotube Growth Using C₂H₂ and H₂ as Precursors
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 938Microstructure and Adhesion Properties of a-CN and...

Microstructure and Adhesion Properties of a-CN and Ti/a-CN Nanocomposite Thin Films Prepared by Hybrid Ion Beam Deposition Technique

Abstract:

Carbon based materials have attracted much for its unique surface microstructure and nanomechanical properties among researchers. In this study, the influence of microstructure on the nanomechanical properties of thin carbon based films was studied in detail. For which amorphous Carbon nitride (a-CN) and Titanium incorporated amorphous Carbon nitride (Ti/a-CN) thin films were prepared with a thickness of less than 100 nm using hybrid ion beam deposition technique. The incorporation of Ti into the a-CN matrix greatly modified the sp³/sp² hybridized bonding ratio and it is reflected in the mechanical hardness of Ti/a-CN thin film. Most of the incorporated Ti reacts with carbon and nitrogen to form TiN and TiCN phases respectively. On the other hand, owing to the usage of energetic ion bombardment and the presence of TiN/TiCN phases in the carbon nitride matrix, the Ti/a-CN nanocomposite film shows improved adhesion strength compared to that of pure a-CN film. Overall the presence of hard metallic phase in the amorphous carbon network alters the microstructure and improves the adhesion strength of a-CN films suitable for protective coating applications.