Synthesize of Mesoporous ZnO Thin Films and Gas Sensing Property

Article Preview

Abstract:

In this work, ordered mesoporous ZnO thin films was synthesized and gas sensor properties were introduced. Mesoporous ZnO thin films were successfully formed by sol-gel process. In ZnO structure, complex agent (MEA) was used for the hydration and condensation reaction. According to the change of MEA concentration, porosity and pore arrangement, specific surface area could be changed. As complex agent concentration decreased, pore ordering was increased and gas sensitivity has the high value (8.01).

You might also be interested in these eBooks

Info:

Periodical:

Advanced Materials Research (Volumes 960-961)

Pages:

157-160

Citation:

Online since:

June 2014

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2014 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] G. J. D. A. A. Soler-Illia, C. Sanchez, B. Lebeau, and J. Patarin, Chemical Reviews Vol. 102(2002) p.4093.

Google Scholar

[2] H. Ra, K. Choi, J. Kim, Y. Hahn, and Y. Im, Small Vol. 4(2008) p.1105.

Google Scholar

[3] Y. Natsume andH. Sakata, Thin Solid Films Vol. 372(2000) p.30.

Google Scholar

[4] M. Smirnov, C. Baban, and G. I. Rusu, Applied Surface Science Vol. 256(2010) p.2405.

Google Scholar

[5] T. Sahoo, M. Kim, M. Lee et al., Journal of Alloys and Compounds Vol. 491(2010) p.308.

Google Scholar

[6] C. J. Brinker, Y. Lu, A. Sellinger, and H. Fan, Advanced Materials Vol. 11(1999) p.579.

Google Scholar

[7] D. Grosso, F. Cagnol, G. J. D. A. A. Soler-Illia et al., Advanced Functional Materials Vol. 14(2004) p.309.

Google Scholar

[8] M.R. Baklanov, K.P. Mogilnikov, Microelectronic Engineering Vol. 64 (2002) p.335.

Google Scholar