Fabrication and Structure Measurement of the Double-Barrier Nano Film Resonant Tunneling Gyroscope

Kang Du; Rui Rong Wang; Meng Wei Li; Yun Bo Shi; Jun Liu

doi:10.4028/www.scientific.net/AMR.97-101.4225

Paper Titles

Error Compensation in One-Point Inclined-Axis Nanogrinding Mode for Small Aspheric Mould
p.4206

Synthesis and Photoluminescence Properties of Novel S_nO₂ Zigzag Nanoribbons
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One-Point Nano-Grinding for Micro-Aspherical Glass Lens Mould
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Design and Research on a Novel NEMS Accelerated Sensor Based on GaAs PHEMT
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Fabrication and Structure Measurement of the Double-Barrier Nano Film Resonant Tunneling Gyroscope
p.4225

An Improved Thermal Type Microsensor with Thermal Isolation Microcracks
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An Improved Calibration Method for Optical 3D Measuring System Using Cross Target Based on Bundle Adjustment Algorithm
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Application of Pressure Test System in Dispenser for Gasoline
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New Method for Large-Scale Dimensional Metrology Using Laser Tracker System
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 97-101Fabrication and Structure Measurement of the...

Fabrication and Structure Measurement of the Double-Barrier Nano Film Resonant Tunneling Gyroscope

Abstract:

In this paper, a gyroscope with novel structure is designed and fabricated by the GaAs surface micromaching technology and GaAs bulk micromachining processes technology to achieve an integration of RTD and gyroscope structure. The structure and properties of RTD are tested by Transmission electron microscopy and Aglient 4156C semiconductor analyzer, and then the key parameters of gyroscope are measured by application of Scanning Electron Microscope. The effect of packaged gyroscope is tested by Polytec Micro-system analyzer. The problems in the fabrication process are analyzed and summarized, which have certain reference significance for the further study.

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Periodical:

Advanced Materials Research (Volumes 97-101)

Pages:

4225-4229

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.97-101.4225

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Online since:

March 2010

Authors:

Kang Du, Rui Rong Wang, Meng Wei Li, Yun Bo Shi, Jun Liu

Keywords:

Gyroscope, Process Defect, Resonant Tunnelling Diode (RTD), Structure Measurement

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