Relationship of Pressure and Plasma Temperature in Plasma DC Glow Discharge

Kanchaya Honglertkongsakul; Dusit Ngamrungroj

doi:10.4028/www.scientific.net/AMR.979.293

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 979Relationship of Pressure and Plasma Temperature in...

Relationship of Pressure and Plasma Temperature in Plasma DC Glow Discharge

Abstract:

The DC glow discharge of nitrogen gas was carried out by 5 kV DC power supply, which was used to bias voltage between two parallel plate electrodes in the cylindrical glass tube chamber. The distance between two parallel plate electrodes was about 37.5 cm. The voltage was applied on these electrodes between 800 V to 1400 V. The nitrogen pressure in the cylindrical glass tube chamber was controlled by rotary pump and vacuum value. Optical Emission Spectroscopy (OES) was used to investigate the local emissivity of nitrogen glow discharge in the range between 200 and 1,100 nm. The spatial distribution of reactive species was measured at different nitrogen pressures from 0.15-1.90 mbar. These measurements were obtained to analyze the electron temperature. The effect of different nitrogen pressures was studied on the electron temperature and the configuration of nitrogen plasma. In the result, it was found that the plasma column increased with increasing the nitrogen pressure. The electron temperature was less than 0.8 eV.

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Periodical:

Advanced Materials Research (Volume 979)

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293-296

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https://doi.org/10.4028/www.scientific.net/AMR.979.293

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Online since:

June 2014

Authors:

Kanchaya Honglertkongsakul*, Dusit Ngamrungroj

Keywords:

DC Glow Discharge, Electron Temperature, Optical Emission Spectroscopy

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