Impact Velocity Analysis of Capacitive RF-MEMS Switch

Rui Wu; Ming Xin Song

doi:10.4028/www.scientific.net/AMR.981.560

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 981Impact Velocity Analysis of Capacitive RF-MEMS...

Impact Velocity Analysis of Capacitive RF-MEMS Switch

Abstract:

Impact velocity is an important performance parameter for capacitive RF-MEMS switch. This paper establishes a differential equation, in order to analyse the influencing factors of impact velocity. The simulation results show that impact velocity can reach 1.5m/s when bias voltage equals to 0.7V, frequency equals to 3×10⁵Hz, voltage type adopts rectangular wave.

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Periodical:

Advanced Materials Research (Volume 981)

Pages:

560-563

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.981.560

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Online since:

July 2014

Authors:

Rui Wu, Ming Xin Song*

Keywords:

Impact Velocity, RF-MEMS Switch

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* - Corresponding Author

References

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