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Determination of the Optical Constants of Gallium Oxide Films

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Abstract:

Transmission spectrum and reflectance spectrum have long been used to characterize gap semiconductor. Transmission spectrum can be measured very directly, but the influence of substrate absorption is often unavoidable. However, when using the reflectance spectrum measurement, the absorption of thin film, substrate absorption, and coherent interference will make the reflectance spectrum much more complicated. In this paper, Considering the absorption of thin film, substrate absorption, and coherent interference, we use the envelope curves algorithm to achieve the calculation formula of refractive index deduced from the reflectance spectrum. Through the analysis of the reflectance spectrum of Ga2O3 film, we achieved thickness of the film, refractive index, extinction and absorption coefficient and dispersion constant.

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Info:

Periodical:

Advanced Materials Research (Volumes 986-987)

Pages:

42-46

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.986-987.42

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Cite this paper

Online since:

July 2014

Authors:

Chang Long Sun*, Zhen Ping Wu, Shi Jie Lu, Zhen Ren, Yue Hua An, Dao You Guo, Xun Cai Guo, Xu Long Chu, Wei Hua Tang

Keywords:

Ga2O3 Film, Optical Constant, Reflectance Spectrum, Transmission Spectrum

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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