The Influence of Diamond Graver’s Edge Radius in Diffraction Grating Scoring Process

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Abstract:

Diffraction grating is a kind of very sophisticated optical element, It is usually used diamond ruled grating. Edge radius is one of the important parameters of diamond ruled grating, the effect of the edge radius to diffraction efficiency and ruled depth is analyzed by the theoretical calculation and finite element analysis in this paper. Get the influence law of diffraction efficiency, ruled depth and the ruling force, which has provided the theory basis for correctly precision edge radius.

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Advanced Materials Research (Volumes 989-994)

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2939-2942

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July 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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