The Absolute Measurement Deviation of Rotational Averaging Mirror Surface Based on the Finite Element Method

Abstract:

In order to obtain higher levels of surface form accuracy, it adopted rotational averaging method, analyzed the supporting position and rotation-angle deviation of the model via the finite element analysis technology. You can see that the mirror surface Peak Valley Value and Root Mean Square Value, increase with the increase of supporting and angle deviation. Thus, to realize high precision mirror surface detection, it should guarantee the supporting position and rotation-angle deviation of the model at the same time. The measurement precision of rotational averaging method absolute measurement can achieve one percent wavelength (λ=632.8nm),it is far superior to the other detection technology in absolute measurement.

• Periodical: Advanced Materials Research (Volumes 998-999)
• Pages: 481-485
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.998-999.481
• Online since: July 2014
• Authors: Yue Liu*, Tian Tian Ren, Jin Shan Guo
• Keywords: Absolute Measurement, Mirror Surface, Rotational Averaging Method, Zernike Polynomial

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