Hydrogen Diffusion Mechanisms and Hydrogen-Dopant Interactions in Diamond

Abstract:

Electronic grade diamond is usually grown by Microwave Plasma assisted CVD from a hydrogen rich CH4/H2 mixture, hence hydrogen is likely to be incorporated during growth. It may thus affect the properties of the material. In this work, we present the state of the art on the understanding of the diffusion properties of hydrogen and of the hydrogen-dopant interactions in diamond. First, we show the existence of strong interactions between H and boron dopants in diamond. The formation of H-acceptor pairs results in the passivation of the acceptors. Further, we show that an excess of hydrogen in selected boron-doped diamond epitaxial layers can result in the creation of H and boron-containing donors with a ionization energy of 0.36 eV (about half the ionization energy of phosphorus). At 300 K, the n-type conductivity of hydrogenated borondoped diamond is several orders of magnitude higher than the conductivity of phosphorus-doped diamond. The formation process of these new donors is discussed.

• Periodical: Advances in Science and Technology (Volume 46)
• Pages: 63-72
• DOI: https://doi.org/10.4028/www.scientific.net/AST.46.63
• Online since: October 2006
• Authors: Jacques Chevallier, François Jomard, Cecile Saguy, R. Kalish, A. Deneuville
• Keywords: Complex Formation, Diamond, Diffusion, Doping, Hydrogen, Passivation

References

[1] J. Isberg, J. Hammersberg, E. Johansson, T. Wikstrom, D.J. Twitchen, A.J. Whitehead, S.E. Coe and G.A. Scarsbrook: Science Vol. 297 (5587) (2002) p.1670.

DOI: 10.1126/science.1074374

[2] R.D. Maclear, J.E. Butler, S.H. Connel, B.P. Doyle, I.Z. Machi, D.B. Rebuli, J.P.F. Sellshop and F. Sideras-Maddad, Diamond Relat. Mater. Vol. 8 (1999) p.1615.

DOI: 10.1016/s0925-9635(99)00061-8

[3] J.P. Goss, R. Jones, M.I. Heggie, C.P. Ewels, P.R. Briddon and S. Öberg, Phys. Rev. B Vol. 65 (2002) p.115207.

[4] C.G. Van de Walle and J. Neugebauer, Nature Vol. 423 (2003) p.626.

[5] C. Saguy, Defect and Diffusion Forum, Vol. 226-228 (2004) p.31.

[6] T. Zundel and J. Weber, Phys. Rev. B Vol. 46 (1992) p. (2071).

[7] M.S. Janson, A. Hallén, M.K. Linarsson and B.G. Svensson, Phys. Rev. B Vol. 64 (2001) p.195202.

[8] D. Ballutaud, F. Jomard, J. Le Duigou, B. Theys, J. Chevallier, A. Deneuville, F. Pruvost, Diamond Relat. Mater. Vol. 9 (2000) p.1171.

DOI: 10.1016/s0925-9635(99)00273-3

[9] Z. Teukam, D. Ballutaud, F. Jomard, J. Chevallier, M. Bernard and A. Deneuville, Diamond Relat. Mater. Vol. 12 (2003) p.647.

DOI: 10.1016/s0925-9635(02)00240-6

[10] J. Chevallier, D. Ballutaud, B. Theys, F. Jomard, A. Deneuville, E. Gheeraert and F. Pruvost, Phys. Stat. Sol. (a) Vol. 174 (1999) p.73.

DOI: 10.1002/(sici)1521-396x(199907)174:1<73::aid-pssa73>3.0.co;2-5

[11] J. Chevallier, B. Theys, A. Lusson, C. Grattepain, A. Deneuville and E. Gheeraert, Phys. Rev. B Vol. 58 (1998) p.7966.

DOI: 10.1103/physrevb.58.7966

[12] J.P. Goss, J. Phys. Condens. Matter Vol. 15 (2003) p. R551.

[13] R. Zeisel, C.E. Nebel and M. Stutzmann, Appl. Phys. Lett. Vol. 74 (1999) p.1875.

[14] C. Uzan-Saguy, A. Reznik, C. Cytermann, R. Brener, R. Kalish, E. Bustarret, M. Bernard, A. Deneuville, E. Gheeraert and J. Chevallier, Diamond Relat. Mater. Vol. 10 (2001) p.453.

DOI: 10.1016/s0925-9635(00)00568-9

[15] J. Chevallier, Z. Teukam, C. Saguy, R. Kalish, C. Cytermann, F. Jomard, M. Barbé, T. Kociniewski, J.E. Butler, C. Baron and A. Deneuville, Phys. Stat. Sol. (a) Vol. 201 (2004) p.2444.

DOI: 10.1002/pssa.200405180

[16] J.S. Blakemore in: Solid State Physics, 2 nd edition (Cambridge University Press, 1985) p.320.

[17] Z. Teukam, J. Chevallier, C. Saguy, R. Kalish, D. Ballutaud, M. Barbé, F. Jomard, A. TromsonCarli, C. Cytermann, J.E. Butler, M. Bernard, C. Baron and A. Deneuville, Nature Materials Vol. 2 (2003) p.482.

DOI: 10.1038/nmat929

[18] J.P. Goss, P.R. Briddon, S.J. Sque and R. Jones, Phys. Rev. B Vol. 69 (2004) p.165215.

[19] Y. Dai, D. Dai, D. Liu, S. Han and B. Huang, Appl. Phys. Lett. Vol. 84 (2004) p.1895.

[20] C. Saguy, R. Kalish, J. Chevallier, F. Jomard, C. Cytermann, B. Philosoph, T. Kociniewski, D. Ballutaud, C. Baron and A. Deneuville, Diamond Relat. Mater. 2006 (to be published).

DOI: 10.1016/j.diamond.2006.12.007

[21] C. Saguy, R. Kalish, C. Cytermann, J. Barjon, T. Kociniewski, F. Jomard, J. Chevallier, J.E. Butler and A. Deneuville, XIth workshop on Surface and Bulk Defects in CVD diamond films, Diepenbeck, Belgium (February 2006) (unpublished).

DOI: 10.4028/www.scientific.net/ssp.108-109.703