Humidity Sensors Based on Nanostructured Materials

Abstract:

Constraction and characteristics of sorption polymeric relative humidity sensors, sorption SiOx microhumidity sensors, and condensation type (dew point) sensors are compared. The characteristics of the sensors are examined in dew point range from -80 to +20oC. An integrated multifunctional humidity sensor, for measurements in wide humidity range at different conditions is developed. The sensors are intended for use in various branches of industry, and in scientific researches.

• Periodical: Advances in Science and Technology (Volume 51)
• Pages: 197-200
• DOI: https://doi.org/10.4028/www.scientific.net/AST.51.197
• Online since: October 2006
• Authors: S. Krutovertsev, A. Tarasova, L. Krutovertseva, A. Zorin, O. Ivanova
• Keywords: Micro-Relative Humidity, Polyimide Film, SiO_x Film

References

[1] R.K. Nahar, V.K. Khanna: Sensors and Actuators, B 46 (1998), p.35.

[2] Weon-Pil Tai, Jae-Hee Oh: Sensors and Actuators, B 85 (2002), p.154.

[3] J.M. Ingram, M. Greb, J.A. Nicolson, A.W. Fountain: Sensors and Actuators, B 96 (2003), p.283.

[4] V. Ducéré, A. Bernès, C. Lacabanne: Sensors and Actuators, B 106 (2005), p.331.

[5] K. Stephenson: Solid State Technology, (1980), p.34.

[6] C.J. Brinker, G.W. Sherer, Sol-Gel Science (Academic Press, San Diego 1990), p.839.

[15] [20] [25] [30] [35] 31. 3. 06 1. 4. 06 2. 4. 06 3. 4. 06 4. 4. 06 Time, day Humidity.

[20] [21] [22] [23] [24] [25] [26] [27] [28] [29] Temperature, o C.