MEMS Rotational Actuator for High Force and Large Displacement
A MEMS thermal actuator that provides rotational or near-linear translational displacements is investigated. This actuator provides a solution to applications that require highforces and large displacements. Output moments up to 7x10-7 N-m and free rotations of up to 3 degrees were measured. These correspond to forces of up to 1.44mN at a displacement of 23.7μm, yielding a work of 3.41x10-8 N-m. An electrothermal-mechanical model that considers temperature dependence of material properties is presented, and the model predictions show good agreement with actuator test data.
Pietro VINCENZINI and Giuseppe D'ARRIGO
L. J. Currano et al., "MEMS Rotational Actuator for High Force and Large Displacement", Advances in Science and Technology, Vol. 54, pp. 372-377, 2008