MEMS Rotational Actuator for High Force and Large Displacement

Abstract:

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A MEMS thermal actuator that provides rotational or near-linear translational displacements is investigated. This actuator provides a solution to applications that require highforces and large displacements. Output moments up to 7x10-7 N-m and free rotations of up to 3 degrees were measured. These correspond to forces of up to 1.44mN at a displacement of 23.7μm, yielding a work of 3.41x10-8 N-m. An electrothermal-mechanical model that considers temperature dependence of material properties is presented, and the model predictions show good agreement with actuator test data.

Info:

Periodical:

Edited by:

Pietro VINCENZINI and Giuseppe D'ARRIGO

Pages:

372-377

DOI:

10.4028/www.scientific.net/AST.54.372

Citation:

L. J. Currano et al., "MEMS Rotational Actuator for High Force and Large Displacement", Advances in Science and Technology, Vol. 54, pp. 372-377, 2008

Online since:

September 2008

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Price:

$35.00

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