MEMS Rotational Actuator for High Force and Large Displacement

Luke J. Currano; Danny Gee; Wayne A. Churaman; Madan Dubey; Paul Amirtharaj; Miao Yu; Balakumar Balachandran

doi:10.4028/www.scientific.net/AST.54.372

Paper Titles

CNT Based Sensors
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Design and Fabrication of a MEMS AC Electric Current Sensor
p.350

A Review of Test Structures for Characterising Microelectronic and MEMS Technology
p.356

Friction Drive Simulation of a SAW Motor with Slider Surface Texture Variation
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MEMS Rotational Actuator for High Force and Large Displacement
p.372

Design and Fabrication of a Horizontal Thermal Micro-Actuator with Integrated Micro Tweezers
p.378

Three-Axis MEMS Threshold Accelerometer Switch for Enhanced Power Conservation of MEMS Sensors
p.384

Electromechanical Behavior of Single and Multiwall Carbon Nanotubes
p.390

The Promise of Nano and Micro Systems for Meeting the Emerging Demands of the US Army
p.396

HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 54MEMS Rotational Actuator for High Force and Large...

MEMS Rotational Actuator for High Force and Large Displacement

Abstract:

A MEMS thermal actuator that provides rotational or near-linear translational displacements is investigated. This actuator provides a solution to applications that require highforces and large displacements. Output moments up to 7x10-7 N-m and free rotations of up to 3 degrees were measured. These correspond to forces of up to 1.44mN at a displacement of 23.7μm, yielding a work of 3.41x10-8 N-m. An electrothermal-mechanical model that considers temperature dependence of material properties is presented, and the model predictions show good agreement with actuator test data.