A Review of Test Structures for Characterising Microelectronic and MEMS Technology

Abstract:

Article Preview

This paper reviews present day test structures and illustrates how they have evolved to a continuously changing technology. Structures for measuring resistivity, contact resistance, feature dimensions and overlay errors are presented as are MEMS (Micro-Electro-Mechanical Systems)/microsystems specific devices.

Info:

Periodical:

Edited by:

Pietro VINCENZINI and Giuseppe D'ARRIGO

Pages:

356-365

DOI:

10.4028/www.scientific.net/AST.54.356

Citation:

A. J. Walton and S. Smith, "A Review of Test Structures for Characterising Microelectronic and MEMS Technology", Advances in Science and Technology, Vol. 54, pp. 356-365, 2008

Online since:

September 2008

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Price:

$35.00

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