A Review of Test Structures for Characterising Microelectronic and MEMS Technology

Anthony J. Walton; Stewart Smith

doi:10.4028/www.scientific.net/AST.54.356

Paper Titles

New Electroconducting Radical Cation Salts Based on BEDT-TTF with 8,8’-Dibromo Cobalt Bis(Dicarbollide) Anion
p.331

Modulation of the Metallic Oxide Properties through of Soft Chemistry Techniques for Several Applications
p.337

CNT Based Sensors
p.343

Design and Fabrication of a MEMS AC Electric Current Sensor
p.350

A Review of Test Structures for Characterising Microelectronic and MEMS Technology
p.356

Friction Drive Simulation of a SAW Motor with Slider Surface Texture Variation
p.366

MEMS Rotational Actuator for High Force and Large Displacement
p.372

Design and Fabrication of a Horizontal Thermal Micro-Actuator with Integrated Micro Tweezers
p.378

Three-Axis MEMS Threshold Accelerometer Switch for Enhanced Power Conservation of MEMS Sensors
p.384

HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 54A Review of Test Structures for Characterising...

A Review of Test Structures for Characterising Microelectronic and MEMS Technology

Abstract:

This paper reviews present day test structures and illustrates how they have evolved to a continuously changing technology. Structures for measuring resistivity, contact resistance, feature dimensions and overlay errors are presented as are MEMS (Micro-Electro-Mechanical Systems)/microsystems specific devices.