A Review of Test Structures for Characterising Microelectronic and MEMS Technology
This paper reviews present day test structures and illustrates how they have evolved to a continuously changing technology. Structures for measuring resistivity, contact resistance, feature dimensions and overlay errors are presented as are MEMS (Micro-Electro-Mechanical Systems)/microsystems specific devices.
Pietro VINCENZINI and Giuseppe D'ARRIGO
A. J. Walton and S. Smith, "A Review of Test Structures for Characterising Microelectronic and MEMS Technology", Advances in Science and Technology, Vol. 54, pp. 356-365, 2008