Effect of Methane Flow Rate on the Microstructural and Mechanical Properties of Silicon Carbide Thin Films Deposited by Reactive DC Magnetron Sputtering

Erdem Baskurt; Tolga Tavşanoğlu; Yücel Onüralp

doi:10.4028/www.scientific.net/AST.66.35

Paper Titles

Ti–Si–C Films Formed by Dual Beam Ion Assisted Deposition
p.11

A Comparison between Conventional Thermal Treatment and Excimer Laser Irradiation Performed on Alumina/PEEK Composite Coatings
p.17

Application of SEM/TEM to Tests on Pt Distribution in Al₂O₃ Films Obtained by Oxidising FeCrAl Steel Foil Coated with Pt-Al Nanofilms
p.23

A Chemometric Study of Alumina/PEEK and Hydroxyapatite/PEEK Suspensions Prepared for Electrophoretic Deposition of Multifunctional Coatings
p.29

Effect of Methane Flow Rate on the Microstructural and Mechanical Properties of Silicon Carbide Thin Films Deposited by Reactive DC Magnetron Sputtering
p.35

ESR Study of Elements Added-DLC Films Deposited by PBII and RF-CVD Methods
p.41

Development of Advanced Coatings for ITER and Future Fusion Devices
p.47

Mechanical and Surface Properties of Chemical Vapor Deposited Protective Aluminium Oxide Films on TA6V Alloy
p.66

Oxidation Behavior of Thermal Barrier Coatings on Copper Substrates
p.74

HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 66Effect of Methane Flow Rate on the Microstructural...

Effect of Methane Flow Rate on the Microstructural and Mechanical Properties of Silicon Carbide Thin Films Deposited by Reactive DC Magnetron Sputtering

Abstract:

SiC films were deposited by reactive DC magnetron sputtering of high purity (99.999%) Si target. 3 types of substrates, AISI M2 grade high speed steel, glass and Si (100) wafer were used in each deposition. The effect of different CH4 flow rates on the microstructural properties and surface morphologies were characterized by cross-sectional FE-SEM (Field-Emission Scanning Electron Microscope) observations. SIMS (Secondary Ion Mass Spectrometer) depth profile analysis showed that the elemental film composition was constant over the whole film depth. XRD (X-Ray Diffraction) results indicated that films were amorphous. Nanomechanical properties of SiC films were also investigated.

You might also be interested in these eBooks

12th INTERNATIONAL CERAMICS CONGRESS PART E

View Preview

Info:

Periodical:

Advances in Science and Technology (Volume 66)

Pages:

35-40

DOI:

https://doi.org/10.4028/www.scientific.net/AST.66.35

Citation:

Cite this paper

Online since:

October 2010

Authors:

Erdem Baskurt, Tolga Tavşanoğlu, Yücel Onüralp

Keywords:

Magnetron Sputtering, Silicon Carbide (SiC), Thin Film

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] A. Mahmood, S. Muhl, L. Enrique Sansores, E. Andrade, in: Dependency of reactive magnetron-sputtered SiC film quality on the deposition parameters, Thin Solid Films Vol. 373 (2000), pp.180-183.

DOI: 10.1016/s0040-6090(00)01130-5

Google Scholar

[2] Y.M. Lei, Y.H. Yu, C.X. Ren, S.C. Zou, D.H. Chen, S.P. Wong, I.H. Wilson, in: Compositional and structural studies of DC magnetron sputtered SiC films on Si(111), Thin Solid Films Vol. 365 (2000), pp.53-57.

DOI: 10.1016/s0040-6090(99)01092-5

Google Scholar

[3] A.K. Costa, S.S. Camargo Jr, C.A. Achete, R. Carius, in: Characterization of ultra-hard silicon carbide coatings deposited by RF magnetron sputtering, Thin Solid Films Vol. 377-378 (2000), pp.243-248.

DOI: 10.1016/s0040-6090(00)01321-3

Google Scholar

[4] Information on https: /www. ifm. liu. se/semicond/new_page/research/sic.

Google Scholar

[5] Y.M. Lei, Y.H. Yu, L.L. Cheng, C.X. Ren, S.C. Zou, S.P. Wong, D.H. Chen, I.H. Wilson, in: IR studies of reactive DC magnetron sputtered SiC films on silicon using effective medium theory, Materials Letters Vol. 43 (2000), pp.215-219.

DOI: 10.1016/s0167-577x(99)00262-1

Google Scholar

[6] K. Wasa, M. Kitabatake and H. Adachi, in: Thin Film Materials Technology: Sputtering of Compound Materials, edited by Noyes Publications/William Andrew Publishing, Norwich, NY (2004), p.347.

DOI: 10.1016/b978-081551483-1.50005-8

Google Scholar