Physical Properties of Boron-Nitride and Carbon-Nitride Films Deposited by Sputtering

Abstract:

Article Preview

Info:

Periodical:

Defect and Diffusion Forum (Volumes 134-135)

Edited by:

David J. Fisher

Pages:

3-14

DOI:

10.4028/www.scientific.net/DDF.134-135.3

Citation:

G. Fusco et al., "Physical Properties of Boron-Nitride and Carbon-Nitride Films Deposited by Sputtering", Defect and Diffusion Forum, Vols. 134-135, pp. 3-14, 1996

Online since:

March 1996

Export:

Price:

$35.00

In order to see related information, you need to Login.