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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 134-135Physical Properties of Boron-Nitride and...

Physical Properties of Boron-Nitride and Carbon-Nitride Films Deposited by Sputtering

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Defect and Diffusion Forum Vols. 134-135

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Periodical:

Defect and Diffusion Forum (Volumes 134-135)

Pages:

3-14

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.134-135.3

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Online since:

March 1996

Authors:

G. Fusco, Fabrizio Giorgis, C. Fabrizio Pirri, Alberto Tagliaferro, Elena Tresso, C. De Martino, P. Rava

Keywords:

Boron-Nitrogen Alloys, Carbon-Nitrogen Alloys, Hard Coating, Structural Property

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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