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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 143-147Diffusion of Transition Metals in Amorphous...

Diffusion of Transition Metals in Amorphous Silicon and Germanium

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Diffusion in Materials DIMAT 1996

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Periodical:

Defect and Diffusion Forum (Volumes 143-147)

Pages:

729-734

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.143-147.729

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Online since:

January 1997

Authors:

M. Horz, W. Gustin, P. Scharwaechter, W. Frank

Keywords:

Amorphous Ge, Amorphous Si, Amorphous Si-Ge Alloys, Diffusion, Ion Implantation, Radio-Tracer Technique, Structural Relaxation, Transition Metal, Trap

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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