Si/SiNx: Interface Defects
a.530
Si/Si3N4: Interface Defects
a.531
Si/SiO2: Dislocations
a.532
Si/SiO2: Interface Defects
a.533
Si/SiO2: Interface Defects
a.534
Si/SiO2: Interface Defects
a.535
Si/SiO2: Interface Defects
a.536
Si/SiO2: Interface Defects
a.537
Si/SiO2: Interface Defects
a.538