SiGe/Si: Dislocations and Stacking Faults
a.705
a.705
SiGe/Si: Interface Defects
a.706
a.706
SiGe/Si: Point Defects
a.707
a.707
SiGe/Si: Surface Defects and Surface Reconstruction
a.708
a.708
SiGe/SiO2: Interface Defects
a.709
a.709
Si3N4: Point Defects
a.710
a.710
Si3N4: Stacking Faults
a.711
a.711
Si3N4/Si: Dislocations
a.712
a.712
TiN: Al, Si Diffusion
a.713
a.713
SiGe/SiO2: Interface Defects
Page: A709