Structural Defects in Amorphous Silicon Oxynitride and Silicon Nitride

Abstract:

Article Preview

Info:

Periodical:

Defect and Diffusion Forum (Volumes 218-220)

Edited by:

D.J. Fisher

Pages:

39-50

DOI:

10.4028/www.scientific.net/DDF.218-220.39

Citation:

H. Kato and Y. Ohki, "Structural Defects in Amorphous Silicon Oxynitride and Silicon Nitride ", Defect and Diffusion Forum, Vols. 218-220, pp. 39-50, 2003

Online since:

August 2003

Authors:

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.