Si/Al: Interdiffusion
a.529
Si/HfO2: Interface Defects
a.530
Si/SiGe: Interdiffusion
a.531
Si/SiGe: Interdiffusion
a.532
Si/SiGe: Dislocations and Point Defects
a.533
Si/SiO2: Interface Defects
a.534
Si/SiO2: Interface Defects
a.535
Si/SiO2: Interface Defects
a.536
Si/SiO2: Interface Defects
a.537