Si/HfO2: Interface Defects
a.530
a.530
Si/SiGe: Interdiffusion
a.531
a.531
Si/SiGe: Interdiffusion
a.532
a.532
Si/SiGe: Dislocations and Point Defects
a.533
a.533
Si/SiO2: Interface Defects
a.534
a.534
Si/SiO2: Interface Defects
a.535
a.535
Si/SiO2: Interface Defects
a.536
a.536
Si/SiO2: Interface Defects
a.537
a.537
Si/SiO2: Interface Defects
a.538
a.538
Si/SiO2: Interface Defects
Page: A534