The Effect of Mo Crystallinity on Diffusion through the Si-on-Mo Interface in EUV Multilayer Systems

S. Bruijn; R.W.E. van de Kruijs; A.E. Yakshin; F. Bijkerk

doi:10.4028/www.scientific.net/DDF.283-286.657

Paper Titles

Anodic Polarisation Characterisation of Absorbed Hydrogen in Modified Mm(B₅)_x Alloys
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Structure and Properties of Grain Boundaries in Submicrocrystalline W Obtained by Severe Plastic Deformation
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Desorption Kinetics of Hydrogen in Mg₂NiH₄ Hydride and in Hydrogeneated Eutectic (Mg/Mg₂Ni)H_x
p.639

Ti Redistribution in Multifilamentary Nb/Cu-Sn Composites
p.649

The Effect of Mo Crystallinity on Diffusion through the Si-on-Mo Interface in EUV Multilayer Systems
p.657

Hydrogen Absorption in Ion Beam Sputtered Titanium Thin Films
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Grain Boundary Diffusion and Segregation of Co and Cr in Zr-Based Alloys
p.669

Measurement of Fracture Toughness in AISI 1018 Borided Steels by Vickers Indentation
p.675

Determination of Boron Diffusion Coefficients in Borided Tool Steels
p.681

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The Effect of Mo Crystallinity on Diffusion through the Si-on-Mo Interface in EUV Multilayer Systems

Abstract:

Thermally induced diffusion through the Si-on-Mo interface of multilayers with either amorphous or polycrystalline Mo layers has been investigated using grazing incidence and wide angle x-ray reflectometry. Diffusion through the Mo-on-Si interface was reduced by applying a diffusion barrier, allowing us to probe the diffusion at the opposite, Si-on-Mo interface.We found that diffusion through this interface is much slower for polycrystalline Mo than for amorphous Mo layers. The reason for this difference might be the larger defect concentration in amorphous Mo as compared to crystalline Mo.

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