Optical and Mechanical Properties of Aluminum Film Deposited on Glass Substrate

Shiuh Chuan Her; Yi Hsia Wang

doi:10.4028/www.scientific.net/DDF.297-301.444

Paper Titles

Water Vapor Permeability of Clay Nanocomposites Based on Amorphous PET
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Heat Transfer Enhancement of Jet Impingement on a Flat Plate Attached by a Porous Medium with a Center Cavity
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Analysis of Component Depth Profiles at the Interface of Ti6242 Alloy and SiC, SiN Coatings after High Temperature Oxidation in Air
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Embrittlement of Cu and Cu-Based Alloys by Bi and Bi₂Te₃
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Optical and Mechanical Properties of Aluminum Film Deposited on Glass Substrate
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The Effect of Matrix Stiffness on the Mechanical Properties of the Composite Reinforced with Multi-Wall Carbon Nanotube
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Numerical Simulation of Natural Convection in a Mold
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Interdiffusion Studies in the Co- Mo System
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Study on the Growth of Nb₃Sn Superconductor in Cu(Sn)/Nb Diffusion Couple
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Optical and Mechanical Properties of Aluminum Film Deposited on Glass Substrate

Abstract:

The aluminum film with high reflectivity and low absorption in the visible wavelength region has been widely used in optical applications. In this investigation, aluminum films were prepared on glass substrates by electron-beam vapor deposition. The reflectivity of the Al thin film was measured by a Perkin-Elmer Lambda spectrophotometer in the wavelength region of 450-680 nm. The experimental measurements of reflectivity were validated with the numerical results using the Essential Macleod software. The surface topology and microstructure of the film were examined by means of atomic force microscope (AFM). The effects of the temperature and humidity on the reflectivity of the Al film were examined by the environmental test. Nanoindentation tests were employed to determine the hardness and Young’s modulus of the film. The measured hardness of the Al thin films were found to depend on the penetration depth.