Investigation of Thermal Properties of Thin Semiconductor Layers Deposited on a Glass Substrate by the Photothermal Deflection Technique

Imen Gaied; Mohamed Ben Rabeh; Adel Rabhi; Mounir Kanzari; Noureddine Yacoubi

doi:10.4028/www.scientific.net/DDF.297-301.537

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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 297-301Investigation of Thermal Properties of Thin...

Investigation of Thermal Properties of Thin Semiconductor Layers Deposited on a Glass Substrate by the Photothermal Deflection Technique

Abstract:

In this work we describe a method based on the Photothermal Deflection Technique adapted for the determination of thermal properties of thin semiconductor layers deposited on a glass substrate. The sample placed in air is heated thanks a modulated pump uniform beam coming from a halogen lamp. The thermal conductivity and the thermal diffusivity are obtained by comparing the amplitude and phase variations versus square root modulation frequency between the experimental curves and the corresponding theoretical ones. The best coincidence permits to deduce the thermal properties of the sample.

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Periodical:

Defect and Diffusion Forum (Volumes 297-301)

Pages:

537-542

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.297-301.537

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Online since:

April 2010

Authors:

Imen Gaied, Mohamed Ben Rabeh, Adel Rabhi, Mounir Kanzari, Noureddine Yacoubi

Keywords:

Photothermal Deflection Technique, Thermal Conductivity (TC), Thermal Diffusivity, Thin Semiconductor Film

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